MIRROR FACET FOR A SEGMENTED MIRROR

Details for Australian Patent Application No. 2003205668 (hide)

Owner CARL ZEISS SMT AG

Inventors MELZER, Frank

Pub. Number AU-A-2003205668

PCT Number PCT/EP03/00716

PCT Pub. Number WO2003/067288

Priority 102 04 249.7 02.02.02 DE

Filing date 24 January 2003

Wipo publication date 2 September 2003

International Classifications

G02B 005/08 Optical elements other than lenses - Mirrors

G02B 007/185 Mountings, adjusting means, or light-tight connections, for optical elements

G02B 005/09 Optical elements other than lenses - Multifaceted or polygonal mirrors

G02B 007/198 Mountings, adjusting means, or light-tight connections, for optical elements - with means for adjusting the mirror relative to its support

Event Publications

17 July 2003 Complete Application Filed

  Priority application(s): 102 04 249.7 02.02.02 DE

25 September 2003 Application Open to Public Inspection

  Published as AU-A-2003205668

21 October 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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