METHOD FOR MANUFACTURING A FREE-STANDING SUBSTRATE MADE OF MONOCRYSTALLINE SEMICONDUCTOR MATERIAL

Details for Australian Patent Application No. 2003205663 (hide)

Owner S.O.I.TEC SILICON INSULATOR TECHNOLOGIES

Inventors GHYSELEN, Bruno; LETERTRE, Fabrice; MAZURE, Carlos

Pub. Number AU-A-2003205663

PCT Number PCT/EP03/00693

PCT Pub. Number WO2003/062507

Priority 0200762 22.01.02 FR

Filing date 21 January 2003

Wipo publication date 2 September 2003

International Classifications

C30B 029/40 Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape

H01L 021/20 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

C23C 016/27 Chemical deposition or plating by decomposition

Event Publications

17 July 2003 Complete Application Filed

  Priority application(s): 0200762 22.01.02 FR

18 September 2003 Application Open to Public Inspection

  Published as AU-A-2003205663

7 October 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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