SYSTEMS AND METHODS FOR CLOSED LOOP DEFECT REDUCTION

Details for Australian Patent Application No. 2003205180 (hide)

Owner KLA-TENCOR TECHNOLOGIES CORP.

Inventors MARELLA, Paul

Pub. Number AU-A-2003205180

PCT Number PCT/US03/01419

PCT Pub. Number WO2003/063233

Priority 60/349,323 16.01.02 US

Filing date 16 January 2003

Wipo publication date 2 September 2003

International Classifications

H01L 021/66 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof - Testing or measuring during manufacture or treatment

Event Publications

17 July 2003 Complete Application Filed

  Priority application(s): 60/349,323 16.01.02 US

18 September 2003 Application Open to Public Inspection

  Published as AU-A-2003205180

30 September 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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