INSPECTION DEVICE USING SCANNING ELECTRON MICROSCOPE

Details for Australian Patent Application No. 2003203360 (hide)

Owner SONY CORPORATION JEOL LTD.

Inventors AKI, Yuichi; NORIOKA, Setsuo; TAKEDA, Minoru; FUJITA, Hironori; HATTORI, Tadashi; OKAWAUCHI, Kouki; ABE, Tetsuo; NAKAGAWA, Seiichi; MIYOKAWA, Toshiaki; DATE, Naoki

Pub. Number AU-A-2003203360

PCT Number PCT/JP03/00479

PCT Pub. Number WO2003/062806

Priority 2002-11286 21.01.02 JP

Filing date 21 January 2003

Wipo publication date 2 September 2003

International Classifications

H01L 021/66 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof - Testing or measuring during manufacture or treatment

H01J 037/28 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - with scanning beams

H01J 037/20 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Means for supporting or positioning the object or the material

G01N 023/225 Investigating or analysing materials by the use of wave or particle radiation not covered by group or , e.g. X-rays, neutrons

Event Publications

17 April 2003 Complete Application Filed

  Priority application(s): 2002-11286 21.01.02 JP

18 September 2003 Application Open to Public Inspection

  Published as AU-A-2003203360

7 October 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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