Owner MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.

Inventors KAWAGUCHI, Yasutoshi; ISHIBASHI, Akihiko; TSUJIMURA, Ayumu

Pub. Number AU-A-2003203186

PCT Number PCT/JP03/00451

PCT Pub. Number WO2003/063215

Priority 2002-11335 21.01.02 JP

Filing date 21 January 2003

Wipo publication date 2 September 2003

H01L 021/20 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 031/10 Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength, or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation - characterised by at least one potential-jump barrier or surface barrier, e.g. phototransistors

H01L 033/00 Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission

H01S 005/323 Semiconductor lasers

H01L 021/205 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 029/201 Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having at least one potential-jump barrier or surface barrier

H01L 021/338 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof