PLASMA PROCESSING DEVICE AND PRODUCTION METHOD OF THINFILM FORMING SUBSTRATE

Details for Australian Patent Application No. 2003203160 (hide)

Owner SHARP KABUSHIKI KAISHA

Inventors SAKAI, Osamu

Pub. Number AU-A-2003203160

PCT Number PCT/JP03/00224

PCT Pub. Number WO2003/081650

Priority 2002-086148 26.03.02 JP

Filing date 14 January 2003

Wipo publication date 8 October 2003

International Classifications

H01L 021/205 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

C23C 016/509 Chemical deposition or plating by decomposition

H01L 021/3065 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

10 April 2003 Complete Application Filed

  Priority application(s): 2002-086148 26.03.02 JP

13 November 2003 Application Open to Public Inspection

  Published as AU-A-2003203160

16 December 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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