LIGHTING SYSTEM COMPRISING A NESTED COLLECTOR FOR ANNULARLY ILLUMINATING AN EXIT PUPIL

Details for Australian Patent Application No. 2003202578 (hide)

Owner CARL ZEISS SMT AG

Inventors WANGLER, Johannes; SOHMEN, Eric; SINGER, Wolfgang

Pub. Number AU-A-2003202578

PCT Number PCT/EP03/00491

PCT Pub. Number WO2003/075068

Priority 102 08 854.3 01.03.02 DE

Filing date 20 January 2003

Wipo publication date 16 September 2003

International Classifications

G02B 019/00 Condensers

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

Event Publications

10 April 2003 Complete Application Filed

  Priority application(s): 102 08 854.3 01.03.02 DE

23 October 2003 Application Open to Public Inspection

  Published as AU-A-2003202578

18 November 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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