METHOD AND DEVICE TO FORM HIGH QUALITY OXIDE LAYERS OF DIFFERENT THICKNESS IN ONE PROCESSING STEP

Details for Australian Patent Application No. 2003201110 (hide)

Owner KONINKLIJKE PHILIPS ELECTRONICS N.V.

Inventors LOO, Josine, J., G., P.; PONOMAREV, Youri; SCHAIJK, Robertus, T., F.

Pub. Number AU-A-2003201110

PCT Number PCT/IB03/00136

PCT Pub. Number WO2003/065437

Priority 02075425.5 01.02.02 EP

Filing date 20 January 2003

Wipo publication date 2 September 2003

International Classifications

H01L 021/316 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/8247 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/28 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

27 March 2003 Complete Application Filed

  Priority application(s): 02075425.5 01.02.02 EP

18 September 2003 Application Open to Public Inspection

  Published as AU-A-2003201110

21 October 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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