PROJECTION LENS WITH NONROUND DIAPHRAGM FOR MICROLITHOGRAPHY

Details for Australian Patent Application No. 2002368362 (hide)

Owner CARL ZEISS SMT AG

Inventors MANN, Hans-Jurgen; SINGER, Wolfgang

Pub. Number AU-A-2002368362

PCT Number PCT/EP2002/0146

PCT Pub. Number WO2004/046771

Priority 102 54 310.0 21.11.02 DE

Filing date 20 December 2002

Wipo publication date 15 June 2004

International Classifications

G02B 005/00 Optical elements other than lenses

G02B 017/06 Systems with reflecting surfaces, with or without refracting elements

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

Event Publications

8 July 2004 Complete Application Filed

  Priority application(s): 102 54 310.0 21.11.02 DE

15 July 2004 Application Open to Public Inspection

  Published as AU-A-2002368362

22 September 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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