CHEMICALLY AMPLIFIED POLYMER HAVING PENDANT GROUP WITH CAMPHORYL AND RESIST COMPOSITION COMPRISING THE SAME

Details for Australian Patent Application No. 2002368318 (hide)

Owner DONGJIN SEMICHEM CO., LTD.

Inventors CHOI, Yong-Joon; SON, Eun-Kyung; KIM, Deog-Bae; KIM, Jae-Hyun

Pub. Number AU-A-2002368318

PCT Number PCT/KR2002/0021

PCT Pub. Number WO2004/042476

Priority 2002-0067884 04.11.02 KR

Filing date 19 November 2002

Wipo publication date 7 June 2004

International Classifications

G03F 007/039 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Macromolecular compounds which are photodegradable, e.g. positive electron resists

Event Publications

24 June 2004 Complete Application Filed

  Priority application(s): 2002-0067884 04.11.02 KR

1 July 2004 Application Open to Public Inspection

  Published as AU-A-2002368318

21 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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