FIDUCIAL ALIGNMENT MARKS ON MICROELECTRONIC SPRING CONTACTS

Details for Australian Patent Application No. 2002368160 (hide)

Owner FORMFACTOR, INC.

Inventors MARTIN, Robert, C.; WATJE, Eric, T.

Pub. Number AU-A-2002368160

PCT Number PCT/US2002/0224

PCT Pub. Number WO2004/015432

Filing date 15 July 2002

Wipo publication date 25 February 2004

International Classifications

G01R 001/073 Details of instruments or arrangements of the types included in groups and - Multiple probes

H01L 021/66 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof - Testing or measuring during manufacture or treatment

Event Publications

25 March 2004 Complete Application Filed

8 April 2004 Application Open to Public Inspection

  Published as AU-A-2002368160

21 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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