MEMS CAPPING METHOD AND APPARATUS

Details for Australian Patent Application No. 2002368046 (hide)

Owner ANALOG DEVICES, INC.

Inventors COLLINS, David, J.; MARTIN, John, R.; WEBSTER, William, A.; FELTON, Lawrence, E.; FARRELL, Peter, W.; LUO, Jing

Pub. Number AU-A-2002368046

PCT Number PCT/US02/33811

PCT Pub. Number WO2004/003965

Priority 10/002,953 23.10.01 US

Filing date 23 October 2002

Wipo publication date 19 January 2004

Event Publications

26 February 2004 Complete Application Filed

  Priority application(s): 10/002,953 23.10.01 US

4 March 2004 Application Open to Public Inspection

  Published as AU-A-2002368046

8 July 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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