PROCESS FOR CLEANING AND REPASSIVATING SEMICONDUCTOR EQUIPMENT PARTS

Details for Australian Patent Application No. 2002367999 (hide)

Owner ADVANCED TECHNOLOGY MATERIALS, INC.

Inventors PEEBLES, Henry, C.

Pub. Number AU-A-2002367999

PCT Number PCT/US02/16670

PCT Pub. Number WO2003/101762

Filing date 28 May 2002

Wipo publication date 19 December 2003

International Classifications

B44C 001/22 Processes, not specifically provided for elsewhere, for producing decorative surface effects - Removing surface-material, e.g. by engraving, by etching

C23F 001/00 Etching metallic material by chemical means

Event Publications

5 February 2004 Complete Application Filed

12 February 2004 Application Open to Public Inspection

  Published as AU-A-2002367999

14 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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