BAND GAP ENGINEERING OF AMORPHOUS AL-GA-N ALLOYS

Details for Australian Patent Application No. 2002367819 (hide)

Owner OHIO UNIVERSITY

Inventors KORDESCH, Martin, E.

Pub. Number AU-A-2002367819

PCT Number PCT/US02/38286

PCT Pub. Number WO2003/080889

Priority 10/086,291 01.03.02 US; 10/086,492 01.03.02 US

Filing date 2 December 2002

Wipo publication date 8 October 2003

International Classifications

C23C 014/06 Coating by vacuum evaporation, by sputtering or by ion implantation - characterised by the coating material

H01L 021/203 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

6 November 2003 Complete Application Filed

  Priority application(s): 10/086,291 01.03.02 US; 10/086,492 01.03.02 US

13 November 2003 Application Open to Public Inspection

  Published as AU-A-2002367819

12 May 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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