METHOD OF CARRYING SUBSTRATE

Details for Australian Patent Application No. 2002367724 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors YUASA, Mitsuhiro; HOMMA, Koji

Pub. Number AU-A-2002367724

PCT Number PCT/JP02/13680

PCT Pub. Number WO2003/073495

Priority 2002-51782 27.02.02 JP; 2002-51783 27.02.02 JP

Filing date 26 December 2002

Wipo publication date 9 September 2003

International Classifications

H01L 021/68 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/304 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H02N 013/00 Clutches or holding devices using electrostatic attraction, e.g. using Johnson-Rahbek effect

Event Publications

9 October 2003 Complete Application Filed

  Priority application(s): 2002-51782 27.02.02 JP; 2002-51783 27.02.02 JP

16 October 2003 Application Open to Public Inspection

  Published as AU-A-2002367724

23 October 2003 Application Open to Public Inspection

  Published as AU-A-2002367724

7 April 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2002367725-Network gaming system

2002367723-SOLAR CELL MODULE AND MANUFACTURING METHOD THEREOF