SUPERCRITICAL FLUID CLEANING OF SEMICONDUCTOR SUBSTRATES

Details for Australian Patent Application No. 2002367291 (hide)

Owner ADVANCED TECHNOLOGY MATERIALS, INC.

Inventors XU, Chongying; MINSEK, David, W.; ROEDER, Jeffrey, F.; KORZENSKI, Michael, B.; BAUM, Thomas, H.

Pub. Number AU-A-2002367291

PCT Number PCT/US02/40033

PCT Pub. Number WO2003/057811

Priority 60/345,900 31.12.01 US; 10/303,450 25.11.02 US

Filing date 13 December 2002

Wipo publication date 24 July 2003

International Classifications

C11D 001/02 Surface-active non-soap detergents -

C11D 003/43 Other compounding ingredients of detergent compositions covered in group - Solvents

C11D 003/44 Other compounding ingredients of detergent compositions covered in group

D06L 001/02 Dry-cleaning or washing fibres, threads, yarns, fabrics, feathers, or made-up fibrous goods

C25F 003/12 Electrolytic etching or polishing

C25F 003/30 Electrolytic etching or polishing

Event Publications

4 September 2003 Application Open to Public Inspection

  Published as AU-A-2002367291

4 September 2003 Complete Application Filed

  Priority application(s): 60/345,900 31.12.01 US; 10/303,450 25.11.02 US

16 September 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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