SCANNING ELECTRON MICROSCOPE ASSEMBLY AND METHOD FOR USING SAME

Details for Australian Patent Application No. 2002366895 (hide)

Owner FEI COMPANY

Inventors STEFFEN, Thomas; DE JONGE, Niels; BUIJSSE, Bart; DONA, Marinus, J., J.; KRANS, Jan, M.; MENTINK, Sjoerd, A., M.; SOMEREN, Bob

Pub. Number AU-A-2002366895

PCT Number PCT/IB02/05458

PCT Pub. Number WO2003/054909

Priority 01205045.6 20.12.01 EP

Filing date 16 December 2002

Wipo publication date 9 July 2003

International Classifications

H01J 037/28 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - with scanning beams

H01J 037/18 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof

B23Q 001/38 Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members

Event Publications

28 August 2003 Complete Application Filed

  Priority application(s): 01205045.6 20.12.01 EP

2 October 2003 Application Open to Public Inspection

  Published as AU-A-2002366895

16 September 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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