METHOD AND DEVICE FOR DEPOSITING CRYSTALLINE LAYERS ON CRYSTALLINE SUBSTRATES

Details for Australian Patent Application No. 2002366860 (hide)

Owner AIXTRON AG

Inventors JURGENSEN, Holger

Pub. Number AU-A-2002366860

PCT Number PCT/EP02/13830

PCT Pub. Number WO2003/054256

Priority 101 63 394.7 21.12.01 DE

Filing date 6 December 2002

Wipo publication date 9 July 2003

International Classifications

C30B 025/02 Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour deposition growth - Epitaxial-layer growth

C30B 025/14 Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour deposition growth - Feed and outlet means for the gases

C23C 016/44 Chemical deposition or plating by decomposition - characterised by the method of coating

Event Publications

28 August 2003 Complete Application Filed

  Priority application(s): 101 63 394.7 21.12.01 DE

2 October 2003 Application Open to Public Inspection

  Published as AU-A-2002366860

16 September 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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