METHOD FOR DEPOSITING III-V SEMICONDUCTOR LAYERS ON A NON-III-V SUBSTRATE

Details for Australian Patent Application No. 2002366856 (hide)

Owner AIXTRON AG

Inventors JURGENSEN, Holger; KROST, Alois; DADGAR, Armin

Pub. Number AU-A-2002366856

PCT Number PCT/EP02/12869

PCT Pub. Number WO2003/054929

Priority 101 63 718.7 21.12.01 DE; 102 06 753.8 19.02.02 DE; 102 19 223.5 30.04.02 DE

Filing date 16 November 2002

Wipo publication date 9 July 2003

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

28 August 2003 Complete Application Filed

  Priority application(s): 101 63 718.7 21.12.01 DE; 102 06 753.8 19.02.02 DE; 102 19 223.5 30.04.02 DE

2 October 2003 Application Open to Public Inspection

  Published as AU-A-2002366856

16 September 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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