METHOD FOR OPTIMIZING THE IMAGING CHARACTERISTICS OF AT LEAST TWO OPTICAL ELEMENTS AND PHOTOLITHOGRAPHIC PRODUCTION PROCESS

Details for Australian Patent Application No. 2002366852 (hide)

Owner CARL ZEISS SMT AG

Inventors MECKING, Birgit; GRUNER, Toralf; KOHL, Alexander

Pub. Number AU-A-2002366852

PCT Number PCT/EP02/11030

PCT Pub. Number WO2003/054631

Priority 101 62 796.3 20.12.01 DE

Filing date 2 October 2002

Wipo publication date 9 July 2003

International Classifications

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

G02B 005/30 Optical elements other than lenses - Polarising elements

G02B 001/02 Optical elements characterised by the material of which they are made

G02B 001/08 Optical elements characterised by the material of which they are made - made of polarising materials

Event Publications

28 August 2003 Complete Application Filed

  Priority application(s): 101 62 796.3 20.12.01 DE

2 October 2003 Application Open to Public Inspection

  Published as AU-A-2002366852

16 September 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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