SYSTEM AND METHOD FOR REDUCING PHOTORESIST PHOTO-OXIDATIVE DEGRADATION IN 193 NM PHOTOLITHOGRAPHY

Details for Australian Patent Application No. 2002366552 (hide)

Owner ADVANCED MICRO DEVICES, INC.

Inventors OKOROANYANWU, Uzodinma

Pub. Number AU-A-2002366552

PCT Number PCT/US02/39370

PCT Pub. Number WO2003/050614

Priority 10/017,871 11.12.01 US

Filing date 9 December 2002

Wipo publication date 23 June 2003

Event Publications

28 August 2003 Application Open to Public Inspection

  Published as AU-A-2002366552

28 August 2003 Complete Application Filed

  Priority application(s): 10/017,871 11.12.01 US

26 August 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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