PLANARITY DETECTION METHODS AND APPARATUS FOR ELECTROCHEMICAL MECHANICAL PROCESSING SYSTEMS

Details for Australian Patent Application No. 2002366549 (hide)

Owner NUTOOL, INC.

Inventors UZOH, Cyprian, E.; BASOL, Bulent

Pub. Number AU-A-2002366549

PCT Number PCT/US02/39102

PCT Pub. Number WO2003/050867

Priority 10/017,494 07.12.01 US

Filing date 5 December 2002

Wipo publication date 23 June 2003

International Classifications

H01L 021/66 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof - Testing or measuring during manufacture or treatment

Event Publications

28 August 2003 Application Open to Public Inspection

  Published as AU-A-2002366549

28 August 2003 Complete Application Filed

  Priority application(s): 10/017,494 07.12.01 US

26 August 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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