AUTOMATIC MULTI-CHANNEL ETCHING SYSTEM

Details for Australian Patent Application No. 2002366434 (hide)

Owner COENEN, Wolfgang

Inventors COENEN, Wolfgang

Pub. Number AU-A-2002366434

PCT Number PCT/EP02/14144

PCT Pub. Number WO2003/052796

Priority 101 62 191.4 17.12.01 DE

Filing date 12 December 2002

Wipo publication date 30 June 2003

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

28 August 2003 Application Open to Public Inspection

  Published as AU-A-2002366434

28 August 2003 Complete Application Filed

  Priority application(s): 101 62 191.4 17.12.01 DE

16 September 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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