METHODS OF AND APPARATUS FOR MAKING HIGH ASPECT RATIO MICROELECTROMECHANICAL STRUCTURES

Details for Australian Patent Application No. 2002366385 (hide)

Owner UNIVERSITY OF SOUTHERN CALIFORNIA

Inventors COHEN, Adam, L.

Pub. Number AU-A-2002366385

PCT Number PCT/US02/33249

PCT Pub. Number WO2003/071008

Priority 60/329,654 15.10.01 US

Filing date 15 October 2002

Wipo publication date 9 September 2003

International Classifications

C25D 005/02 Electroplating characterised by the process - Electroplating of selected surface areas

C25D 007/12 Electroplating characterised by the article coated - Semiconductors

Event Publications

28 August 2003 Complete Application Filed

  Priority application(s): 60/329,654 15.10.01 US

9 October 2003 Application Open to Public Inspection

  Published as AU-A-2002366385

1 July 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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