METHOD FOR POLISHING A SUBSTRATE SURFACE

Details for Australian Patent Application No. 2002365979 (hide)

Owner RENSSELAER POLYTECHNIC INSTITUTE

Inventors SCHOWALTER, Leo, J.; ROJO, Carlos, J.; MARTINEZ LOPEZ, Javier; MORGAN, Kenneth

Pub. Number AU-A-2002365979

PCT Number PCT/US02/37135

PCT Pub. Number WO2003/043780

Priority 60/331,868 20.11.01 US

Filing date 20 November 2002

Wipo publication date 10 June 2003

Event Publications

14 August 2003 Complete Application Filed

  Priority application(s): 60/331,868 20.11.01 US

21 August 2003 Application Open to Public Inspection

  Published as AU-A-2002365979

5 August 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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