TEXTURED-METASTABLE ALUMINUM ALLOY SPUTTER TARGETS

Details for Australian Patent Application No. 2002365427 (hide)

Owner PRAXAIR S.T. TECHNOLOGY, INC.

Inventors GILMAN, Paul, S.; VAN DEN SYPE, Jaak, Stefaan; PERRY, Andrew, C.

Pub. Number AU-A-2002365427

PCT Number PCT/US02/33717

PCT Pub. Number WO2003/066929

Priority 09/991,851 14.11.01 US

Filing date 23 October 2002

Wipo publication date 2 September 2003

International Classifications

C23C 014/34 Coating by vacuum evaporation, by sputtering or by ion implantation - Sputtering

C22C 021/04 Alloys based on aluminium

C22C 021/12 Alloys based on aluminium - with copper as the next major constituent

B08B 007/00 Cleaning by methods not provided for in a single other subclass or a single group in this subclass

B08B 007/02 Cleaning by methods not provided for in a single other subclass or a single group in this subclass - by distortion, beating, or vibration of the surface to be cleaned

B44C 001/22 Processes, not specifically provided for elsewhere, for producing decorative surface effects - Removing surface-material, e.g. by engraving, by etching

C22C 021/00 Alloys based on aluminium

C22C 021/02 Alloys based on aluminium - with silicon as the next major constituent

Event Publications

14 August 2003 Complete Application Filed

  Priority application(s): 09/991,851 14.11.01 US

25 September 2003 Application Open to Public Inspection

  Published as AU-A-2002365427

29 July 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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