METHOD OF FABRICATING MICROELECTROMECHANICAL SWITCHES ON CMOS COMPATIBLE SUBSTRATES

Details for Australian Patent Application No. 2002365158 (hide)

Owner INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventors PETRARCA, Kevin, S.; STEIN, Kenneth, J.; SUBBANNA, Seshadri; VOLANT, Richard, P.; BISSON, John, C.; COTE, Donna, R.; DALTON, Timothy, J.; GROVES, Robert, A.

Pub. Number AU-A-2002365158

PCT Number PCT/US02/36088

PCT Pub. Number WO2003/054938

Priority 10/014,660 07.11.01 US

Filing date 7 November 2002

Wipo publication date 9 July 2003

International Classifications

H01L 021/20 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

31 July 2003 Complete Application Filed

  Priority application(s): 10/014,660 07.11.01 US

2 October 2003 Application Open to Public Inspection

  Published as AU-A-2002365158

22 July 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2002365159-SYSTEM AND METHOD FOR BIOMETRIC IMAGE CAPTURING

2002365157-METHODS AND SYSTEMS OF NUCLEIC ACID SEQUENCING