OBJECTIVE WITH BIREFRINGENT LENSES

Details for Australian Patent Application No. 2002364974 (hide)

Owner CARL ZEISS SMT AG

Inventors TOTZECK, Michael; KAMENOV, Vladimir; KRAHMER, Daniel; ULRICH, Wilhelm

Pub. Number AU-A-2002364974

PCT Number PCT/EP02/14638

PCT Pub. Number WO2004/023184

Priority 102 41 102.6 03.09.02 DE; 102 53 353.9 14.11.02 DE

Filing date 20 December 2002

Wipo publication date 29 March 2004

International Classifications

G02B 013/14 Optical objectives specially designed for the purposes specified below - for use with infra-red or ultra-violet radiation

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

G02B 005/30 Optical elements other than lenses - Polarising elements

Event Publications

31 July 2003 Complete Application Filed

  Priority application(s): 102 41 102.6 03.09.02 DE; 102 53 353.9 14.11.02 DE

13 May 2004 Application Open to Public Inspection

  Published as AU-A-2002364974

19 May 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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