METHOD OF CONTROLLING METAL ETCH PROCESSES, AND SYSTEM FOR ACCOMPLISHING SAME

Details for Australian Patent Application No. 2002364910 (hide)

Owner ADVANCED MICRO DEVICES, INC.

Inventors LENSING, Kevin, R.; STIRTON, James, Broc; PURDY, Matthew, A.

Pub. Number AU-A-2002364910

PCT Number PCT/US02/40674

PCT Pub. Number WO2003/073494

Priority 10/083,710 26.02.02 US

Filing date 18 December 2002

Wipo publication date 9 September 2003

International Classifications

H01L 021/66 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof - Testing or measuring during manufacture or treatment

Event Publications

24 July 2003 Complete Application Filed

  Priority application(s): 10/083,710 26.02.02 US

16 October 2003 Application Open to Public Inspection

  Published as AU-A-2002364910

11 November 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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