METHODS FOR PLANARIZATION OF METAL-CONTAINING SURFACES USING HALOGENS AND HALIDE SALTS

Details for Australian Patent Application No. 2002364180 (hide)

Owner MICRON TECHNOLOGY, INC.

Inventors VAARTSTRA, Brian, A.

Pub. Number AU-A-2002364180

PCT Number PCT/US02/40504

PCT Pub. Number WO2003/060028

Priority 10/032,049 21.12.01 US

Filing date 17 December 2002

Wipo publication date 30 July 2003

International Classifications

C09G 001/02 Polishing compositions

H01L 021/304 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

17 July 2003 Complete Application Filed

  Priority application(s): 10/032,049 21.12.01 US

4 September 2003 Application Open to Public Inspection

  Published as AU-A-2002364180

16 September 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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