Patterning of solid state features by direct write nanolithographic printing

Details for Australian Patent Application No. 2002364001 (hide)

Owner Northwestern University

Inventors Mirkin, Chad A; Su, Ming; Dravid, Vinayak P; Liu, Xiaogang

Agent Davies Collison Cave

Pub. Number AU-B-2002364001

PCT Number PCT/US02/40118

PCT Pub. Number WO2003/052514

Priority 60/341,614 17.12.01 US

Filing date 17 December 2002

Wipo publication date 30 June 2003

Acceptance publication date 11 September 2008

International Classifications

G03F 7/00 (2006.01) Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces

B82B 3/00 (2006.01) Manufacture or treatment of nano-structures

H01L 21/027 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

17 July 2003 Complete Application Filed

  Priority application(s): 60/341,614 17.12.01 US

28 August 2003 Application Open to Public Inspection

  Published as AU-B-2002364001

11 September 2008 Application Accepted

  Published as AU-B-2002364001

22 January 2009 Standard Patent Sealed

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