LOW TEMPERATURE COMPATIBLE WIDE-PRESSURE-RANGE PLASMA FLOW DEVICE

Details for Australian Patent Application No. 2002363972 (hide)

Owner THE REGENTS OF THE UNIVERSITY OF CALIFORNIA

Inventors WOOD, Blake, P.; SELWYN, Gary, S.

Pub. Number AU-A-2002363972

PCT Number PCT/US02/39028

PCT Pub. Number WO2003/046970

Priority 09/992,061 21.11.01 US

Filing date 21 November 2002

Wipo publication date 10 June 2003

International Classifications

H01L 021/3065 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

C23C 016/505 Chemical deposition or plating by decomposition

Event Publications

17 July 2003 Complete Application Filed

  Priority application(s): 09/992,061 21.11.01 US

21 August 2003 Application Open to Public Inspection

  Published as AU-A-2002363972

5 August 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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