METHOD AND SYSTEM FOR MEASURING THE REPRODUCTION QUALITY OF AN OPTICAL REPRODUCTION SYSTEM

Details for Australian Patent Application No. 2002363884 (hide)

Owner CARL ZEISS SMT AG

Inventors WEGMANN, Ulrich

Pub. Number AU-A-2002363884

PCT Number PCT/EP02/14559

PCT Pub. Number WO2004/057423

Filing date 19 December 2002

Wipo publication date 14 July 2004

International Classifications

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

G01M 011/02 Testing of optical apparatus - Testing of optical properties

Event Publications

17 July 2003 Complete Application Filed

19 August 2004 Application Open to Public Inspection

  Published as AU-A-2002363884

8 September 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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