IMAGING DEVICE IN A PROJECTION EXPOSURE FACILITY

Details for Australian Patent Application No. 2002363876 (hide)

Owner CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AG

Inventors RAOUL, Reiner; RIEF, Klaus; SCHOENGART, Stefan; NEUMAIER, Markus; TROSSBACH, Baerbel; RASSEL, Thorsten; WEBER, Ulrich; MUEHLBEYER, Michael; HOLDERER, Hubert; KOHL, Alexander; WEBER, Jochen; LIPPERT, Johannes; HUMMEL, Wolfgang; FISCHER, Juergen; AUBELE, Karl-Eugen; MERZ, Erich

Pub. Number AU-A-2002363876

PCT Number PCT/EP02/14380

PCT Pub. Number WO2003/052511

Priority 101 62 289.9 19.12.01 DE; 102 25 266.1 07.06.02 DE

Filing date 17 December 2002

Wipo publication date 30 June 2003

Event Publications

17 July 2003 Complete Application Filed

  Priority application(s): 101 62 289.9 19.12.01 DE; 102 25 266.1 07.06.02 DE

28 August 2003 Application Open to Public Inspection

  Published as AU-A-2002363876

9 September 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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