METHOD FOR CLEANING A METAL SURFACE BY A DRY-ETCHING STEP

Details for Australian Patent Application No. 2002363866 (hide)

Owner APPLIED MATERIALS, INC.

Inventors SCHNEIDER, Karsten; WEIHERTELFORD, Susan

Pub. Number AU-A-2002363866

PCT Number PCT/EP02/14022

PCT Pub. Number WO2004/053978

Filing date 10 December 2002

Wipo publication date 30 June 2004

International Classifications

H01L 021/768 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/306 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

17 July 2003 Complete Application Filed

5 August 2004 Application Open to Public Inspection

  Published as AU-A-2002363866

25 August 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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