A METHOD FOR MOLDING A POLYMER SURFACE THAT REDUCES PARTICLE GENERATION AND SURFACE ADHESION FORCES WHILE MAINTAINING A HIGH HEAT TRANSFER COEFFICIENT

Details for Australian Patent Application No. 2002363558 (hide)

Owner AXCELIS TECHNOLOGIES, INC.

Inventors LAGOS, Bryan

Pub. Number AU-A-2002363558

PCT Number PCT/US02/35667

PCT Pub. Number WO2003/041110

Priority 10/045,363 07.11.01 US

Filing date 7 November 2002

Wipo publication date 19 May 2003

International Classifications

H01J 037/317 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - for changing properties of the objects or for applying thin layers thereon, e.g. ion implantation

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

19 June 2003 Complete Application Filed

  Priority application(s): 10/045,363 07.11.01 US

24 July 2003 Application Open to Public Inspection

  Published as AU-A-2002363558

22 July 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2002363559-SAFETY METHOD, DEVICE AND SYSTEM FOR AN ENERGY STORAGE DEVICE

2002363557-PACKAGING FOR CONTACT LENSES