UNIVERSAL MODULAR WAFER TRANSPORT SYSTEM

Details for Australian Patent Application No. 2002363300 (hide)

Owner ASYST TECHNOLOGIES, INC.

Inventors KROLAK, Michael; SPEASL, Jerry; BONORA, Anthony, C.; GOULD, Richard, H.; HINE, Roger, G.

Pub. Number AU-A-2002363300

PCT Number PCT/US02/27979

PCT Pub. Number WO2003/038869

Priority 60/316,722 31.08.01 US

Filing date 3 September 2002

Wipo publication date 12 May 2003

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

5 June 2003 Complete Application Filed

  Priority application(s): 60/316,722 31.08.01 US

10 July 2003 Application Open to Public Inspection

  Published as AU-A-2002363300

17 June 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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