CONTACT PLANARIZATION MATERIALS THAT GENERATE NO VOLATILE BYPRODUCTS OR RESIDUE DURING CURING

Details for Australian Patent Application No. 2002363132 (hide)

Owner BREWER SCIENCE, INC.

Inventors WU-SHENG, Shih; Lamb, James, E., III

Pub. Number AU-A-2002363132

PCT Number PCT/US02/34594

PCT Pub. Number WO2003/038887

Priority 60/335,811 31.10.01 US; 10/282,542 28.10.02 US

Filing date 29 October 2002

Wipo publication date 12 May 2003

International Classifications

H01L 021/4763 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

5 June 2003 Complete Application Filed

  Priority application(s): 60/335,811 31.10.01 US; 10/282,542 28.10.02 US

10 July 2003 Application Open to Public Inspection

  Published as AU-A-2002363132

15 July 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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