AQUEOUS CLEANING COMPOSITION CONTAINING COPPER-SPECIFIC CORROSION INHIBITOR FOR CLEANING INORGANIC RESIDUES ON SEMICONDUCTOR SUBSTRATE

Details for Australian Patent Application No. 2002362996 (hide)

Owner ADVANCED TECHNOLOGY MATERIALS, INC.

Inventors WOJTCZAK, William, A.; SEIJO, Fatima, Ma.; BERNHARD, David; NGUYEN, Long

Pub. Number AU-A-2002362996

PCT Number PCT/US02/33280

PCT Pub. Number WO2003/035797

Priority 10/047,554 23.10.01 US

Filing date 17 October 2002

Wipo publication date 6 May 2003

International Classifications

C09K 013/00 Etching, surface-brightening or pickling compositions

C09K 013/08 Etching, surface-brightening or pickling compositions

H01L 021/302 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

C09K 013/02 Etching, surface-brightening or pickling compositions

C09K 013/04 Etching, surface-brightening or pickling compositions

C09K 013/06 Etching, surface-brightening or pickling compositions

Event Publications

29 May 2003 Complete Application Filed

  Priority application(s): 10/047,554 23.10.01 US

3 July 2003 Application Open to Public Inspection

  Published as AU-A-2002362996

8 July 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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