METHOD FOR PRODUCTION OF A GATE STRUCTURE FOR A MOS TRANSISTOR

Details for Australian Patent Application No. 2002362781 (hide)

Owner INFINEON TECHNOLOGIES AG

Inventors HERZUM, Christian; MULLER, Karlheinz

Pub. Number AU-A-2002362781

PCT Number PCT/EP02/11084

PCT Pub. Number WO2003/032378

Priority 101 49 541.2 08.10.01 DE

Filing date 2 October 2002

Wipo publication date 22 April 2003

International Classifications

H01L 021/28 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 029/423 Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having at least one potential-jump barrier or surface barrier

Event Publications

15 May 2003 Complete Application Filed

  Priority application(s): 101 49 541.2 08.10.01 DE

3 July 2003 Application Open to Public Inspection

  Published as AU-A-2002362781

24 June 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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