TOOL FOR HANDLING WAFERS AND EPITAXIAL GROWTH STATION

Details for Australian Patent Application No. 2002362532 (hide)

Owner LPE SPA

Inventors OGLIARI, Vincenzo; PRETI, Franco

Pub. Number AU-A-2002362532

PCT Number PCT/EP02/10598

PCT Pub. Number WO2003/030222

Priority MI01A002014 27.09.01 IT

Filing date 20 September 2002

Wipo publication date 14 April 2003

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

8 May 2003 Complete Application Filed

  Priority application(s): MI01A002014 27.09.01 IT

26 June 2003 Application Open to Public Inspection

  Published as AU-A-2002362532

17 June 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2002362533-CHIP CARD WITH A DISPLAY

2002362531-DISTRIBUTED FILE SYSTEM AND METHOD OF OPERATING A DISTRIBUTED FILE SYSTEM