APPARATUS AND METHOD FOR SINGLEOR DOUBLESUBSTRATE PROCESSING

Details for Australian Patent Application No. 2002362092 (hide)

Owner SCP GLOBAL TECHNOLOGIES, INC.

Inventors HANSEN, Eric; MIMKEN, Victor; BLECK, Martin; YALAMANCHILI, Rao, M.; ROSATO, John

Pub. Number AU-A-2002362092

PCT Number PCT/US02/39174

PCT Pub. Number WO2003/050861

Priority 10/010,240 07.12.01 US

Filing date 6 December 2002

Wipo publication date 23 June 2003

International Classifications

H01L 021/306 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

B08B 003/00 Cleaning by methods involving the use or presence of liquid or steam

Event Publications

10 April 2003 Complete Application Filed

  Priority application(s): 10/010,240 07.12.01 US

28 August 2003 Application Open to Public Inspection

  Published as AU-A-2002362092

26 August 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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