PROCESSES FOR CLEANING SEMICONDUCTOR EQUIPMENT PARTS

Details for Australian Patent Application No. 2002361866 (hide)

Owner ADVANCED TECHNOLOGY MATERIALS, INC.

Inventors PEEBLES, Henry

Pub. Number AU-A-2002361866

PCT Number PCT/US02/41427

PCT Pub. Number WO2003/057642

Priority 60/346,025 31.12.01 US

Filing date 27 December 2002

Wipo publication date 24 July 2003

International Classifications

C03C 023/00 Other surface treatment of glass not in the form of fibres or filaments

B44C 001/22 Processes, not specifically provided for elsewhere, for producing decorative surface effects - Removing surface-material, e.g. by engraving, by etching

C23G 001/02 Cleaning or pickling metallic material with solutions or molten salts - with acid solutions

Event Publications

10 April 2003 Complete Application Filed

  Priority application(s): 60/346,025 31.12.01 US

4 September 2003 Application Open to Public Inspection

  Published as AU-A-2002361866

16 September 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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