ORGANIC ANTI-REFLECTIVE COATING COMPOSITIONS FOR ADVANCED MICROLITHOGRAPHY

Details for Australian Patent Application No. 2002361686 (hide)

Owner BREWER SCIENCE, INC.

Inventors DESHPANDE, Shreeram, V.

Pub. Number AU-A-2002361686

PCT Number PCT/US02/40074

PCT Pub. Number WO2003/067329

Priority 10/062,790 01.02.02 US

Filing date 13 December 2002

Wipo publication date 2 September 2003

International Classifications

G03C 001/76 Photosensitive materials - Photosensitive materials characterised by the base or auxiliary layers

C08F 034/02 Homopolymers or copolymers of cyclic compounds having no unsaturated aliphatic radicals in a side chain and having one or more carbon-to-carbon double bonds in a heterocyclic ring

C08F 024/00 Homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a heterocyclic ring containing oxygen

G03C 005/00 Photographic processes or agents therefor

G03C 001/725 Photosensitive materials

C08F 220/68 Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride, ester, amide, imide, or nitrile thereof

Event Publications

10 April 2003 Complete Application Filed

  Priority application(s): 10/062,790 01.02.02 US

25 September 2003 Application Open to Public Inspection

  Published as AU-A-2002361686

21 October 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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