SUPERCRITICAL FLUID-ASSISTED DEPOSITION OF MATERIALS ON SEMICONDUCTOR SUBSTRATES

Details for Australian Patent Application No. 2002361683 (hide)

Owner ADVANCED TECHNOLOGY MATERIALS, INC.

Inventors XU, Chongying; BAUM, Thomas, H.

Pub. Number AU-A-2002361683

PCT Number PCT/US02/40047

PCT Pub. Number WO2003/058680

Priority 10/303,479 25.11.02 US; 60/345,738 31.12.01 US

Filing date 13 December 2002

Wipo publication date 24 July 2003

Event Publications

10 April 2003 Complete Application Filed

  Priority application(s): 10/303,479 25.11.02 US; 60/345,738 31.12.01 US

4 September 2003 Application Open to Public Inspection

  Published as AU-A-2002361683

23 September 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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