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Details for Australian Patent Application No. 2002360823 (hide)

Owner E. I. DU PONT DE NEMOURS AND COMPANY NIPPON OIL CORPORATION ISHIHARA CHEMICAL COMPANY, LTD.

Inventors SAKAI, Shuji; UCHIDA, Daisuke; AOYAGI, Kenichi; YAMAMOTO, Shinji; KOBAYASHI, Takashi; MILLER, Chris, L.

Pub. Number AU-A-2002360823

PCT Number PCT/US02/41653

PCT Pub. Number WO2003/049157

Priority 60/334,587 03.12.01 US

Filing date 2 December 2002

Wipo publication date 17 June 2003

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

3 April 2003 Complete Application Filed

  Priority application(s): 60/334,587 03.12.01 US

21 August 2003 Application Open to Public Inspection

  Published as AU-A-2002360823

19 August 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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