PARAMETRIC PROFILING USING OPTICAL SPECTROSCOPIC SYSTEMS

Details for Australian Patent Application No. 2002360738 (hide)

Owner KLA-TENCOR CORPORATION

Inventors BAREKET, Noah; MIEHER, Walter; DZIURA, Ted; SHCHEGROV, Andrei, V.; FABRIKANT, Anatoly; NIKOONAHAD, Mehrdad; LEVY, Ady; WACK, Daniel, C.

Pub. Number AU-A-2002360738

PCT Number PCT/US02/41151

PCT Pub. Number WO2003/054475

Priority 60/343,077 19.12.01 US; Not Given 19.12.02 US

Filing date 19 December 2002

Wipo publication date 9 July 2003

International Classifications

G01B 011/06 Measuring arrangements characterised by the use of optical means - for measuring thickness

G01B 011/24 Measuring arrangements characterised by the use of optical means - for measuring contours or curvatures

G01B 011/30 Measuring arrangements characterised by the use of optical means - for measuring roughness or irregularity of surfaces

G01N 021/21 Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light - Polarisation-affecting properties

H01L 021/66 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof - Testing or measuring during manufacture or treatment

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

Event Publications

3 April 2003 Complete Application Filed

  Priority application(s): 60/343,077 19.12.01 US; Not Given 19.12.02 US

2 October 2003 Application Open to Public Inspection

  Published as AU-A-2002360738

2 September 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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