A METHOD OF IMPROVING SURFACE PLANARITY PRIOR TO MRAM BIT MATERIAL DEPOSITION

Details for Australian Patent Application No. 2002360630 (hide)

Owner MICRON TECHNOLOGY, INC.

Inventors YATES, Donald, L.; DREWES, Joel, A.

Pub. Number AU-A-2002360630

PCT Number PCT/US02/40352

PCT Pub. Number WO2003/054946

Priority 10/022,721 20.12.01 US

Filing date 18 December 2002

Wipo publication date 9 July 2003

International Classifications

H01L 021/302 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

G11C 005/02 Details of stores covered by group - Disposition of storage elements, e.g. in the form of a matrix array

H01L 021/203 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

G11C 011/02 Digital stores characterised by the use of particular electric or magnetic storage elements -

Event Publications

3 April 2003 Complete Application Filed

  Priority application(s): 10/022,721 20.12.01 US

2 October 2003 Application Open to Public Inspection

  Published as AU-A-2002360630

23 September 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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