AUTOMATIC CALIBRATION METHOD FOR SUBSTRATE CARRIER HANDLING ROBOT AND JIG FOR PERFORMING THE METHOD

Details for Australian Patent Application No. 2002360624 (hide)

Owner APPLIED MATERIALS,INC.

Inventors ELLIOTT, Martin, R.,; VAN KATWYK, Kirk; HUDGENS, Jeffrey, C.

Pub. Number AU-A-2002360624

PCT Number PCT/US02/40255

PCT Pub. Number WO2003/054932

Priority 10/025,081 19.12.01 US

Filing date 18 December 2002

Wipo publication date 9 July 2003

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

3 April 2003 Complete Application Filed

  Priority application(s): 10/025,081 19.12.01 US

2 October 2003 Application Open to Public Inspection

  Published as AU-A-2002360624

2 September 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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