METHOD OF ENHANCING PHASE SHIFT MASKS

Details for Australian Patent Application No. 2002360533 (hide)

Owner ADVANCED MICRO DEVICES, INC.

Inventors LUKANC, Todd, P.; SPENCE, Christopher, A.

Pub. Number AU-A-2002360533

PCT Number PCT/US02/39372

PCT Pub. Number WO2003/050616

Priority 10/016,710 11.12.01 US

Filing date 9 December 2002

Wipo publication date 23 June 2003

International Classifications

G03F 001/00 Preparation of originals for the photomechanical production of textured or patterned surfaces

Event Publications

3 April 2003 Complete Application Filed

  Priority application(s): 10/016,710 11.12.01 US

28 August 2003 Application Open to Public Inspection

  Published as AU-A-2002360533

26 August 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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